Characteristic:
- Inlet Port：KF50*2.
- Work Temperature：850ºC.
- High Capacity 600 SLM.
- Independent Inlet & Outlet Pressure Gauges.
- Inlet Heating Rods heating Device.
- Air & N2 preheating device.
- Easy preventive maintenance.
- SEMI S2-0310.
Product Detail
The latest Gas Decompsition Oxidation thermal wet scrubber is a high-tech semiconductor manufacturing process off-gas treatment system, which has high-temperature electric heating chamber. The exhaust gases produced by the process, by the use of a specially designed reaction chamber, are reacted into the powder or substances dissolved in water, and then go through a fully effective backend treatment before discharge to a central processing system of the plant service. Materials used are in line with FM fire certification, and support isys energy saving environmental features. Process off-gas that can be treated includes special gas used by high-tech semiconductor plant, TFT-LCD plant, LED plant, solar power plant ... etc.
Product Specifications：
- Process 2 inlet ports
- Dimension (MM)：950(D) X 1110(W) X 1950(H)
- Weight：450 Kg
- Total capacity (Contains scrubber Air and N2 flow.) 800 SLM
- Optimal capacity (chamber flow) 600 SLM
Optional accessories ：
Exhaust Blower、Extension LCD Monitor Controller、Auto By Pass System 、Preheat Gun、Heating Jacket、PH Meter System